描述
無描述配置
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM 代工型號說明
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ZEISS / CARL ZEISS
1560
已驗證
類別
SEM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Idle
產品編號:
96898
晶圓尺寸:
4"/100mm, 6"/150mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ZEISS / CARL ZEISS
1560
類別
SEM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Idle
產品編號:
96898
晶圓尺寸:
4"/100mm, 6"/150mm
年份:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
6" stage and loadlock. 6” wafer loading thru the loadlock is possible. Fjeld 6” loadlock and stage. Schottky field emission gun In-lens SE & E-T SE detectors Capable of 1nm resolution at 20kV 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door Upgraded to uniplinth. Runs Smartsem v5. Known issues: Some Flickering on image of chamberscope. Upgraded with integrated Current monitor on stage, readable in software. Comes with a variety of sample and wafer holders.OEM 代工型號說明
未提供文檔
無文檔