描述
Hitachi SEM S-4160配置
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEM 代工型號說明
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HITACHI
S-4160
已驗證
類別
SEM
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22445
晶圓尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
S-4160
已驗證
類別
SEM
上次驗證: 28 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
22445
晶圓尺寸:
8"/200mm
年份:
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Hitachi SEM S-4160配置
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEM 代工型號說明
未提供文檔
無文檔