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IDS P3X-II
概述
The IDS P3X-II is the most advanced Focused Ion Beam product used for circuit edit and repair of devices that use 90nm and beyond process technology. The IDS P3X-II combines ion column with a CAD navigation interface, which enables the user to align FIB and CAD images simultaneously. In failure analysis, the IDS P3X-II can identify and repair circuit layout mainly in outer metal layers. The system can provide an option to edit 300mm wafers.
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