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描述
FE SEM配置
無配置OEM 代工型號說明
The S-5500, Immersion Lens system which generates the highest resolution images in the world(*1)(0.4nm at 30kV. The S-5500 have improved performance over that of its predecessor, the S-5200. [Main features of S-5500] (1) The world’s highest resolution, 0.4 nm at 30 kV, achieved by the use of a new electron optics system (as of October 2004). (2) New BF (bright field)/ DF (dark field) Duo STEM (scanning transmission electron microscopy) detector allows simultaneous display of BF and DF STEM images. In DF STEM mode, this detector is capable of providing images with variable detection angles. This new detection system greatly extends the usage of low accelerating voltage STEM at 30 kV.文檔
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HITACHI
S-5500
類別
SEM / FIB
上次驗證: 超過30天前
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條件:
Used
作業狀態:
未知
產品編號:
94623
晶圓尺寸:
12"/300mm
年份:
未知
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描述
FE SEM配置
無配置OEM 代工型號說明
The S-5500, Immersion Lens system which generates the highest resolution images in the world(*1)(0.4nm at 30kV. The S-5500 have improved performance over that of its predecessor, the S-5200. [Main features of S-5500] (1) The world’s highest resolution, 0.4 nm at 30 kV, achieved by the use of a new electron optics system (as of October 2004). (2) New BF (bright field)/ DF (dark field) Duo STEM (scanning transmission electron microscopy) detector allows simultaneous display of BF and DF STEM images. In DF STEM mode, this detector is capable of providing images with variable detection angles. This new detection system greatly extends the usage of low accelerating voltage STEM at 30 kV.文檔
無文檔