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XL830

類別
SEM / FIB
概述

The FEI XL830 is a DualBeam FIB/SEM system that offers high-resolution SEM imaging and quick, accurate ion milling. The SEM column of the DualBeam XL830 workstation delivers 3-nm resolution within the range of 1-30 kV, while the electron column features balanced-field, in-lens detection that provides detailed topographical information, improved visibility down holes, and enhanced imaging of grain boundaries.

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