描述
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.配置
無配置OEM 代工型號說明
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HITACHI
SCDS CD-60
已驗證
類別
Scrubbers - Process Gases
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
43476
晶圓尺寸:
未知
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
SCDS CD-60
已驗證
類別
Scrubbers - Process Gases
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
43476
晶圓尺寸:
未知
年份:
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.配置
無配置OEM 代工型號說明
未提供文檔
無文檔