概述

The DFM2800 is a fully automatic multifunction wafer mounter made by DISCO Corporation1. It is a specialized wafer mounter for inclusion in an inline system with a backgrinder to process Φ300 mm ultra-thin wafers. It mounts wafers that have been thinned with the DGP8761 system onto dicing tape or tape frames and removes the front side protection tape in a stable process.