描述
Operational. Complete with the exception of quartzware.配置
無配置OEM 代工型號說明
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.文檔
無文檔
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116664
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
116664
晶圓尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Operational. Complete with the exception of quartzware.配置
無配置OEM 代工型號說明
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.文檔
無文檔