描述
AG Associates Heatpulse rapid thermal processor配置
無配置OEM 代工型號說明
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.文檔
無文檔
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
126237
晶圓尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
METRON / AG ASSOCIATES
HEATPULSE 8800i
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
126237
晶圓尺寸:
未知
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
AG Associates Heatpulse rapid thermal processor配置
無配置OEM 代工型號說明
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.文檔
無文檔