描述
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications配置
無配置OEM 代工型號說明
未提供文檔
無文檔
MATTSON / STEAG / AST
HEATPULSE 2146
已驗證
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
15979
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MATTSON / STEAG / AST
HEATPULSE 2146
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
15979
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications配置
無配置OEM 代工型號說明
未提供文檔
無文檔