描述
Tool was custom designed and built by Kurt Lesker配置
Key Features • Chamber accommodates 8” (200mm) wafers • Designed to be compatible with cluster tools. • Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr). • Main: Pfeiffer 790L/s Turbomolecular pump with VAT • Load lock: Pfeiffer 67 L/s turbo pump • Roughing pump: Edwards NXDS10I Mechanical scroll pump • Control software and interlocks • Automated heavy duty linear transfer arm • Multiple ports and windows • Multiple gas inlets • Large central port for induction or other feedthrough • High frequency induction heating power source available (Ambrell 6kW)OEM 代工型號說明
未提供文檔
類別
RTP/RTA
上次驗證: 今日
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled / Uncrated
產品編號:
147197
晶圓尺寸:
8"/200mm
年份:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CUSTOM
類別
RTP/RTA
上次驗證: 今日
關鍵商品詳情
條件:
New
作業狀態:
Deinstalled / Uncrated
產品編號:
147197
晶圓尺寸:
8"/200mm
年份:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available