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描述
無描述配置
jipelec jetfirst Rapid Thermal Processor (RTP) - Max. 4 inches diameter Si Wafer. - Ramp rate 100 °C/sec max. - Vacuum = 10-2 mbar max. - Thermocouple, TC = 20 °C to 1000 °C readable. - Pyrometer = 400 °C to 1300 °C readable - Max. operating Temp. = 1200 °COEM 代工型號說明
The Jetfirst RTP system was developed to meet university and research laboratory requirements. The temperature control system provides accurate and repeatable thermal control across the temperature range. The lamp array, upper flange, and quarts window are mounted in a rotating top lid, giving full access to the chamber for easy loading and unloading of the wafer.文檔
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jipelec
JETFIRST
類別
RTP/RTA
上次驗證: 超過60天前
Buyer pays 12% premium of final sale price
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
56624
晶圓尺寸:
未知
年份:
未知
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描述
無描述配置
jipelec jetfirst Rapid Thermal Processor (RTP) - Max. 4 inches diameter Si Wafer. - Ramp rate 100 °C/sec max. - Vacuum = 10-2 mbar max. - Thermocouple, TC = 20 °C to 1000 °C readable. - Pyrometer = 400 °C to 1300 °C readable - Max. operating Temp. = 1200 °COEM 代工型號說明
The Jetfirst RTP system was developed to meet university and research laboratory requirements. The temperature control system provides accurate and repeatable thermal control across the temperature range. The lamp array, upper flange, and quarts window are mounted in a rotating top lid, giving full access to the chamber for easy loading and unloading of the wafer.文檔
無文檔