
描述
RTP配置
1-1. Factory Interface 5.3X ITEM Y(O) / N(X) Yaskawa Dual Arm Robot (XU-RC350D-1B06) O Robot Controller (ERCR-NS01-B004-E1) O Track assembly (XU-ACT101L-G10) O Pre-Aligner O 3 Load Port O Server : Supermicro(QTY.4) O 1-2. Process Chamber(A/B) ITEM Y(O) / N(X) Vulcan ATM, Bottom Heating, Spike Anneal O WRLD Maglev System O IGS Gas Stick MFC Panel O Multi-Zone Lamp Driver O Pyrometers OOEM 代工型號說明
未提供文檔
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96900
晶圓尺寸:
12"/300mm
年份:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
VANTAGE VULCAN
類別
RTP/RTA
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
96900
晶圓尺寸:
12"/300mm
年份:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available