
描述
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1配置
Software Version SL4.2.24OEM 代工型號說明
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.文檔
無文檔
類別
Reticle / Mask Inspection
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
144643
晶圓尺寸:
8"/200mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SL3UV URSA
類別
Reticle / Mask Inspection
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
144643
晶圓尺寸:
8"/200mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1配置
Software Version SL4.2.24OEM 代工型號說明
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.文檔
無文檔