描述
Reticle Inspection配置
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM 代工型號說明
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HORIBA
PR-PD2
類別
Reticle / Mask Inspection
上次驗證: 2 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
155084
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Reticle Inspection配置
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM 代工型號說明
未提供文檔
無文檔