描述
METRO配置
無配置OEM 代工型號說明
The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.文檔
無文檔
類別
Resistivity / Four Point Probe
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
136644
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
OmniMap RS75/tc
類別
Resistivity / Four Point Probe
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
136644
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
METRO配置
無配置OEM 代工型號說明
The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.文檔
無文檔