描述
無描述配置
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM 代工型號說明
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NOVELLUS / VARIAN
3190
已驗證
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
113066
晶圓尺寸:
4"/100mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NOVELLUS / VARIAN
3190
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
113066
晶圓尺寸:
4"/100mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM 代工型號說明
未提供文檔
無文檔