描述
• 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV 500 - Manual load. (1) 500mm x 500mm carrier - Uses Ulvac 12· cryo & 12' water pump/turbo配置
無配置OEM 代工型號說明
未提供文檔
無文檔
ULVAC
SIV-500
類別
PVD / Sputtering
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
128837
晶圓尺寸:
6"/150mm
年份:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
• 3-station process module (P1. P2. P3) • 5 KW pulsed DC power supply • P3 dedicated to ITO or other Transparent Conductive Films <TCF) • P3 has 02 MFC & 13.56 MHz power supply/match to maintain ITO stoichiometry • L/L: has a roughing pump and water pump • Process chamber has a roughing pump. ·red to a turbo/water pump & a cryo pump SIV 500 - Manual load. (1) 500mm x 500mm carrier - Uses Ulvac 12· cryo & 12' water pump/turbo配置
無配置OEM 代工型號說明
未提供文檔
無文檔