描述
DC magnetron Sputter, RF magnetron Sputter 1-3 of cathode. Perkin-Elmer 4410 4450 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4410 4450 Sputtering Deposition Equipment Delta Cathode small sample to 8 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter function配置
無配置OEM 代工型號說明
The Perkin-Elmer 4450 is a type of sputtering system that belongs to the Perkin-Elmer 4400 Series. It is similar to the Model 4410, but has additional features such as load lock pumping and substrate heating. The system can operate automatically and has three Delta™ cathode positions, one of which can be replaced with an in-process heater fixture. The Perkin-Elmer 4450 Sputter Deposition System is designed to be flexible and offers a variety of operating and process modes.文檔
無文檔
類別
PVD / Sputtering
上次驗證: 19 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138660
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PERKIN ELMER
4450
類別
PVD / Sputtering
上次驗證: 19 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138660
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
DC magnetron Sputter, RF magnetron Sputter 1-3 of cathode. Perkin-Elmer 4410 4450 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4410 4450 Sputtering Deposition Equipment Delta Cathode small sample to 8 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter function配置
無配置OEM 代工型號說明
The Perkin-Elmer 4450 is a type of sputtering system that belongs to the Perkin-Elmer 4400 Series. It is similar to the Model 4410, but has additional features such as load lock pumping and substrate heating. The system can operate automatically and has three Delta™ cathode positions, one of which can be replaced with an in-process heater fixture. The Perkin-Elmer 4450 Sputter Deposition System is designed to be flexible and offers a variety of operating and process modes.文檔
無文檔