描述
無描述配置
(4) 8 inch cathodes Magnetrons capability Load lock 2 gas lines with MF Chamber heating function capability CTI Cyo pump. DC magnetron Sputter, RF Diode Sputter, RF magnetron Sputter Maximum 4 of 8 inch cathode. Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Small sample to 6 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter functionOEM 代工型號說明
未提供文檔
無文檔
類別
PVD / Sputtering
上次驗證: 7 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138641
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PERKIN ELMER
4410
類別
PVD / Sputtering
上次驗證: 7 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138641
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
(4) 8 inch cathodes Magnetrons capability Load lock 2 gas lines with MF Chamber heating function capability CTI Cyo pump. DC magnetron Sputter, RF Diode Sputter, RF magnetron Sputter Maximum 4 of 8 inch cathode. Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode Small sample to 6 inch wafer 1-2 gas lines with MFC RF Etch Bias function Loadlock heating function Chamber heating function (Occupy one cathode port). Co-Sputter function Reactive sputter functionOEM 代工型號說明
未提供文檔
無文檔