GALAXY 1000
概述
Galaxy 1000 cluster tool, Flow-Enhanced CVD, W, TiN processes for integrated W plug formation (combined with adhesion layer PVD and aluminum PVD).
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Galaxy 1000 cluster tool, Flow-Enhanced CVD, W, TiN processes for integrated W plug formation (combined with adhesion layer PVD and aluminum PVD).
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檢驗、保險、評估、物流