描述
TFM_TiN-HM Dep配置
無配置OEM 代工型號說明
The INOVA NExT, a 300mm metallization system designed to deposit highly conformal copper barrier-seed films at 45 nanometers and beyond. On the INOVA NExT, the single target HCM technology has been extended to the 45 nanometer node; the system also features an integrated ion-induced atomic layer deposition (iALD) module to deposit tantalum nitride (TaN) barrier films below 45 nanometers.文檔
無文檔
類別
PVD / Sputtering
上次驗證: 17 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
143274
晶圓尺寸:
12"/300mm
年份:
2013
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / NOVELLUS
INOVA NExT
類別
PVD / Sputtering
上次驗證: 17 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
143274
晶圓尺寸:
12"/300mm
年份:
2013
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
TFM_TiN-HM Dep配置
無配置OEM 代工型號說明
The INOVA NExT, a 300mm metallization system designed to deposit highly conformal copper barrier-seed films at 45 nanometers and beyond. On the INOVA NExT, the single target HCM technology has been extended to the 45 nanometer node; the system also features an integrated ion-induced atomic layer deposition (iALD) module to deposit tantalum nitride (TaN) barrier films below 45 nanometers.文檔
無文檔