描述
Sputtering System配置
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 代工型號說明
未提供文檔
無文檔
類別
PVD / Sputtering
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
156149
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CMS-18
類別
PVD / Sputtering
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
156149
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Sputtering System配置
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 代工型號說明
未提供文檔
無文檔