描述
PVD system配置
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM 代工型號說明
未提供文檔
無文檔
類別
PVD / Sputtering
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
155365
晶圓尺寸:
未知
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / UNAXIS / OERLIKON / BALZERS
CLUSTERLINE 200 II CW
類別
PVD / Sputtering
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
155365
晶圓尺寸:
未知
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
PVD system配置
(Qty 3) PVD chambers, positions 3/4/5 Degas chamber, position 1 PM5 hot chuck and pyrometer Brooks control system upgrade (2025) with new aligner Brooks Magnatran MAG 7.1 dual-pan robot, up to 860mm extension Brooks control system with CDM (Qty 2) Load-lock elevators Adapter flange for active wafer centering Transport coolerOEM 代工型號說明
未提供文檔
無文檔