描述
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.配置
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEM 代工型號說明
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CELLO
OHMIKER-90BS (S006)
已驗證
類別
PVD / Sputtering
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
47751
晶圓尺寸:
未知
年份:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CELLO
OHMIKER-90BS (S006)
類別
PVD / Sputtering
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
47751
晶圓尺寸:
未知
年份:
2012
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.配置
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEM 代工型號說明
未提供文檔
無文檔