描述
Target size: φ4 inch, Number of targets: 3 Substrate size: 150 mm, Power supply for sputtering: RF/DC power supply, Substrate heating performance: Max . /min Target 0.25MPa3.0?/min Air pressure 0.5~0.8MPa Mass 1.2t Outer size W2440 D1100 H1600 ・ Controller box Outer size W590 D1010 H1850 Power supply box ② Outer size W560 D700 H1780 Cryocompressor CR420 Three-phase 200V 50/60Hz 2.4 /2.5? Rotary Pump Alcatel 2033 SD配置
無配置OEM 代工型號說明
未提供文檔
無文檔
CANON / ANELVA
L-430S-FHL
已驗證
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
70803
晶圓尺寸:
未知
年份:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON / ANELVA
L-430S-FHL
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
70803
晶圓尺寸:
未知
年份:
1999
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Target size: φ4 inch, Number of targets: 3 Substrate size: 150 mm, Power supply for sputtering: RF/DC power supply, Substrate heating performance: Max . /min Target 0.25MPa3.0?/min Air pressure 0.5~0.8MPa Mass 1.2t Outer size W2440 D1100 H1600 ・ Controller box Outer size W590 D1010 H1850 Power supply box ② Outer size W560 D700 H1780 Cryocompressor CR420 Three-phase 200V 50/60Hz 2.4 /2.5? Rotary Pump Alcatel 2033 SD配置
無配置OEM 代工型號說明
未提供文檔
無文檔