描述
無描述配置
RF DC + Pulse DC / Ion etch device / RGA / Pinnacle 12kW DC + 10kW DC pulsed / Polycold / 2x KryoOEM 代工型號說明
The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a whole host of new features that enhance productivity and reduce materials consumption. Whether its new oval cathode technology for reduced materials costs and particles, next generation magnet systems for enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and lowers production costs.文檔
無文檔
EVATEC / BALZERS
LLS EVO II
已驗證
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
110924
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
EVATEC / BALZERS
LLS EVO II
類別
PVD / Sputtering
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
110924
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
RF DC + Pulse DC / Ion etch device / RGA / Pinnacle 12kW DC + 10kW DC pulsed / Polycold / 2x KryoOEM 代工型號說明
The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a whole host of new features that enhance productivity and reduce materials consumption. Whether its new oval cathode technology for reduced materials costs and particles, next generation magnet systems for enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and lowers production costs.文檔
無文檔