ATC-B-3400-H. Extended process side sputtering batch coater designed for a proprietary application requiring 40-50 thousand layers per run.  Custom AJA STXL-EO (extended operation) magnetrons were designed to prevent aborted processing due to source shorting.  This system will process (8) 6" substrates or hundreds of smaller substrates per batch.

AJA is a manufacturer of thin film deposition systems including magnetron sputtering, e-beam evaporation, thermal evaporation, and ion milling systems.

ATC-B-3400-H

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