ATC-B-3400. Mask making tool processes (6) 8" wafers per batch with up to (3) materials deposited from AJA TR5313 triangular magnetrons for optimum uniformity. The system also includes a 7 substrate cassette in the load-lock to boost throughput up to (60) 8" substrates (or thousands of small substrates) per 8 hour period.

AJA is a manufacturer of thin film deposition systems including magnetron sputtering, e-beam evaporation, thermal evaporation, and ion milling systems.

ATC-B-3400

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