ATC-ORION 8 UHV
概述
ATC-Orion 8 UHV. Fitted with up to (5) 3" or (8) 2" UHV magnetron sputtering sources. This unit features a turbo-pumped vacuum load lock with 6 position cassette. ATC-Orion 8 HV Fitted with up to (5) 3" or (8) 2" HV magnetron sputter sources. This unit features a HiPIMS power supply.
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