描述
Technical Data Displacement (swept volume) 60 Hz 6.7cfm Speed (Pneurop) 60 Hz 5.8 cfm Ultimate vacuum without gas ballast 0.75×10-5 torr (partial pressure) without gas ballast (totalpressure) 0.75×10-4 torr with gas ballast (partial pressure) 2.25×10-2 torr Inlet connection NW25 flange with 15 mm nozzle alternative Outlet connection Nozzle 15 mm external diameter Maximum inlet pressure for water vapor 11 torr Weight 50lb Motor 50 Hz 0.37 kW Motor 60 Hz 0.37 kW Oil capacity-maximum 0.55 liter minimum 0.43 liter Recommended Edwards oil Supergrade A配置
無配置OEM 代工型號說明
Vacuum pump文檔
無文檔
EDWARDS
E2M8
類別
Pumps / Compressor
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
125491
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Technical Data Displacement (swept volume) 60 Hz 6.7cfm Speed (Pneurop) 60 Hz 5.8 cfm Ultimate vacuum without gas ballast 0.75×10-5 torr (partial pressure) without gas ballast (totalpressure) 0.75×10-4 torr with gas ballast (partial pressure) 2.25×10-2 torr Inlet connection NW25 flange with 15 mm nozzle alternative Outlet connection Nozzle 15 mm external diameter Maximum inlet pressure for water vapor 11 torr Weight 50lb Motor 50 Hz 0.37 kW Motor 60 Hz 0.37 kW Oil capacity-maximum 0.55 liter minimum 0.43 liter Recommended Edwards oil Supergrade A配置
無配置OEM 代工型號說明
Vacuum pump文檔
無文檔