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描述
無描述配置
CVD, Furnace, Etch, RTPOEM 代工型號說明
"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required. The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump. There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."文檔
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EDWARDS
QDP80
類別
Pumps / Compressor
上次驗證: 超過60天前
關鍵商品詳情
條件:
Parts Tool
作業狀態:
未知
產品編號:
97010
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
CVD, Furnace, Etch, RTPOEM 代工型號說明
"The QDP80 DRYSTAR Dry pump is available as a stand alone unit or in combination with a QMB500hydrokinetic drive mechanical booster, for applications where more pumping speed and/or lower vacuum levels are required - no pressure switches required. The scope of supply includes as standard an in-line pressure regulator and gauge for facilitating the shaft seal purge, a cleanable stainless steel exhaust silencer, and exhaust check valve. The QDP80 Drystar dry pump will also be supplied with a full accessory fitting kit and will be mounted to the dedicated chassis and castors to enable easy movement of the pump. There is no special control system requirements for pump operation, existing electrical control equipment can be modified to provide simple off/on operation and interface to the (fitted) pump thermal snap switches. Details of how to achieve this are available in the Drystar 80 Electrical Box upgrade guide."文檔
無文檔