描述
DRY PUMP配置
無配置OEM 代工型號說明
Pumping speed (N2) l/min. 7000 Pumping speed (N2) m3/h 420 Ultimate pressure mbar 2x10-3 Ultimate pressure Pa 0.2 Water Consumption l/min 3.5-8 Nitrogen Consumption SLM 11-13 Nitrogen Consumption Pa m3/sec 19-22 Voltages ranges V 200-220/380-415 Motor power, installed kW 7.5 Weight, approx. kg 280 Sizes (LxWxH) mm 830x400x800 Inlet flange size DN 50 KF Outlet flange size DN 40 KF文檔
無文檔
EBARA
AAS70WN
類別
Pumps / Compressor
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132092
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
DRY PUMP配置
無配置OEM 代工型號說明
Pumping speed (N2) l/min. 7000 Pumping speed (N2) m3/h 420 Ultimate pressure mbar 2x10-3 Ultimate pressure Pa 0.2 Water Consumption l/min 3.5-8 Nitrogen Consumption SLM 11-13 Nitrogen Consumption Pa m3/sec 19-22 Voltages ranges V 200-220/380-415 Motor power, installed kW 7.5 Weight, approx. kg 280 Sizes (LxWxH) mm 830x400x800 Inlet flange size DN 50 KF Outlet flange size DN 40 KF文檔
無文檔