
描述
DRY PUMP配置
無配置OEM 代工型號說明
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/min文檔
無文檔
EBARA
ESR80W
類別
Pumps / Compressor
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132773
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
DRY PUMP配置
無配置OEM 代工型號說明
Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime. Pumping Speed (60 Hz): 4,000~8,500 l/min文檔
無文檔