描述
Stylus profiler配置
PHOEM 代工型號說明
The HRP-240 is an automated high-resolution surface metrology tool that provides long scan profilometry and high-resolution imaging for CMP and Etch applications. It has a new Dipping Mode™ capability for high aspect ratio depth monitoring and is reliable and easy to use for high-speed step height monitoring. It is the best solution for topographic metrology for wafer sizes up to 200 mm and can be configured as a basic profiler or a high-resolution, high aspect ratio instrument.文檔
無文檔
KLA
HRP-240
類別
Profiler
上次驗證: 昨日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
102728
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Stylus profiler配置
PHOEM 代工型號說明
The HRP-240 is an automated high-resolution surface metrology tool that provides long scan profilometry and high-resolution imaging for CMP and Etch applications. It has a new Dipping Mode™ capability for high aspect ratio depth monitoring and is reliable and easy to use for high-speed step height monitoring. It is the best solution for topographic metrology for wafer sizes up to 200 mm and can be configured as a basic profiler or a high-resolution, high aspect ratio instrument.文檔
無文檔