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描述
Stylus surface profiler Applications: - Step Height mesurements (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)配置
- Wafer size : up to 8 inch - Microhead 5-xr (13, 131, 1048 um range) - Stylus tip (green): 2um radius - Objective lens : 6.4x, Magnification range : 173x~750x - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition - OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)OEM 代工型號說明
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.文檔
無文檔
KLA
P-17
類別
Profiler
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
115116
晶圓尺寸:
8"/200mm
年份:
2017
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Refurbishment Services
Available
描述
Stylus surface profiler Applications: - Step Height mesurements (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)配置
- Wafer size : up to 8 inch - Microhead 5-xr (13, 131, 1048 um range) - Stylus tip (green): 2um radius - Objective lens : 6.4x, Magnification range : 173x~750x - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition - OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)OEM 代工型號說明
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.文檔
無文檔