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描述
ALPHA STEP配置
無配置OEM 代工型號說明
The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch. The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.文檔
無文檔
KLA
P-1
類別
Profiler
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
121283
晶圓尺寸:
8"/200mm
年份:
未知
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Refurbishment Services
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描述
ALPHA STEP配置
無配置OEM 代工型號說明
The Tencor P-1 Long Scan stylus profiler is the first in the industry to offer ultra-flat 200mm scans in a single profile, without the need to stitch. The release of the P-1 Long Scan profiler features a revolutionary new design, with industry-first innovations to the scanning stage, optics, and sensor technology-—innovations that provide rock-solid stability, unbeatable sensitivity and repeatability. The system features an ultra-flat scanning stage capable of high-resolution scans up to 200mm in a single scan, enabling characterization of surface roughness, waviness, and thin-film stress. The new stage is also the industry’s first 3D scanning stage, adding a third dimension to characterize surface topography. The system features the first top-view optics to provide a clear view of the sample, free of distortion from the traditional angled side-view. Finally, the sensor technology incorporates the industry’s first and only linear variable differential capacitor (LVDC), resulting in sub-Angstrom electronic resolution with a low moment of inertia, enabling low force control and reducing sensitivity to noise.文檔
無文檔