描述
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.配置
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 代工型號說明
RF Generator文檔
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COMDEL
CX-2500
類別
Power Supplies
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Uncrated
產品編號:
126886
晶圓尺寸:
未知
年份:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.配置
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 代工型號說明
RF Generator文檔
無文檔