描述
Nitride Plasma Reactive Ion Etch配置
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 代工型號說明
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TEL / TOKYO ELECTRON
TE 5480
已驗證
類別
Plasma Etch
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
28958
晶圓尺寸:
6"/150mm
年份:
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部TEL / TOKYO ELECTRON
TE 5480
已驗證
類別
Plasma Etch
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
28958
晶圓尺寸:
6"/150mm
年份:
1992
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Nitride Plasma Reactive Ion Etch配置
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 代工型號說明
未提供文檔
無文檔