描述
無描述配置
ICP SILICON DEEP ETCHING Ion Coupled Plasma Etcher System * Load lock shuttle lock transfer * Single chamber ICP MFC: HORIBA SEC-E40 4EA PROCESS GAS: O2, Ar, SF6, C4F6 RFPP * RF POWER PRODUCTS RFPP I22050001 & I20050007 ADAPTIVE PRESSURE CONTROLLER * VAT PM-5 Heater Controller * Plasma-Therm * PC & OS * Plasma-Therm PC OS * RF POWER PRODUCTS RFPP RF5S & AM-5 * SEREN R3001 Turbo Pump * LEYBOLD MAG 2000 Turbo Pump Controller * LEYBOLD MD 2000OEM 代工型號說明
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PLASMA-THERM
SLR 770
已驗證
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
57347
晶圓尺寸:
4"/100mm
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部PLASMA-THERM
SLR 770
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
57347
晶圓尺寸:
4"/100mm
年份:
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
ICP SILICON DEEP ETCHING Ion Coupled Plasma Etcher System * Load lock shuttle lock transfer * Single chamber ICP MFC: HORIBA SEC-E40 4EA PROCESS GAS: O2, Ar, SF6, C4F6 RFPP * RF POWER PRODUCTS RFPP I22050001 & I20050007 ADAPTIVE PRESSURE CONTROLLER * VAT PM-5 Heater Controller * Plasma-Therm * PC & OS * Plasma-Therm PC OS * RF POWER PRODUCTS RFPP RF5S & AM-5 * SEREN R3001 Turbo Pump * LEYBOLD MAG 2000 Turbo Pump Controller * LEYBOLD MD 2000OEM 代工型號說明
未提供文檔
無文檔