描述
無描述配置
Aspen 2 ICP Dual chamber system RFPP RF-10S power generator X 4 RF matching box X 4 Ebara dry pumps : AA100 X 2, A07V X 1 GAS: O2 , N2, CF4 AC box and DC box ACX pressure controller X 2 Aspen 2 computer , include robot index PCB, Analog I/O PCBs, Digital I/O PCBs, CPU board, Hard disk /floppy disk driver. Shuttle, robot assy. arm, slit door, heater block , temperature controller, heater block, quartz tube, lift pin cylinder, throttle valves, Iso valves. No missing parts.OEM 代工型號說明
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.文檔
無文檔
MATTSON
ASPEN II
已驗證
類別
Plasma Etch
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
24735
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASPEN II
已驗證
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
24735
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Aspen 2 ICP Dual chamber system RFPP RF-10S power generator X 4 RF matching box X 4 Ebara dry pumps : AA100 X 2, A07V X 1 GAS: O2 , N2, CF4 AC box and DC box ACX pressure controller X 2 Aspen 2 computer , include robot index PCB, Analog I/O PCBs, Digital I/O PCBs, CPU board, Hard disk /floppy disk driver. Shuttle, robot assy. arm, slit door, heater block , temperature controller, heater block, quartz tube, lift pin cylinder, throttle valves, Iso valves. No missing parts.OEM 代工型號說明
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.文檔
無文檔