描述
Missing parts: RF generator, controller, power rack, control circuit board, internal liner配置
Process Chamber: Enabler Turbo Pump: Shimadzu TMP-3403LMC WFIB: 300mm Enabler WHIB eFIB: 300mm Enabler eFIB Independent Gas Injection: Selectable between 2 gases for each stepOEM 代工型號說明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. To address advanced low k etch applications, the Applied Centura Enabler Etch system performs etch, strip and clean steps in a single chamber. The Enabler’s all-in-one capability streamlines the process flow for advanced chip designs and significantly reduces operating costs. Enabler Chamber: 300mm only.文檔
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APPLIED MATERIALS (AMAT)
CENTURA ENABLER ETCH
已驗證
類別
Plasma Etch
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
87569
晶圓尺寸:
12"/300mm
年份:
2008
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA ENABLER ETCH
已驗證
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
87569
晶圓尺寸:
12"/300mm
年份:
2008
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Missing parts: RF generator, controller, power rack, control circuit board, internal liner配置
Process Chamber: Enabler Turbo Pump: Shimadzu TMP-3403LMC WFIB: 300mm Enabler WHIB eFIB: 300mm Enabler eFIB Independent Gas Injection: Selectable between 2 gases for each stepOEM 代工型號說明
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. To address advanced low k etch applications, the Applied Centura Enabler Etch system performs etch, strip and clean steps in a single chamber. The Enabler’s all-in-one capability streamlines the process flow for advanced chip designs and significantly reduces operating costs. Enabler Chamber: 300mm only.文檔
無文檔