待售二手貨 APPLIED MATERIALS (AMAT) CENTURA AP EMAX

描述

Dielectric Etch

配置

Process: CUOX From original tool PO, please inspect to verify STANDARD SPECIFICATIONSSoftware Revision : VERSION 2.3_43FI Software: B4.3_11GEM SEC Revision: B6.10_20 Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchCarrier: FOUP (Comply with SEMI E47.1 (25wafers))Load Port: 3 LoadportFacility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switchFacility plate: Manual Valve : Supplied by IMI in floorFacility plate: Pressure Gauge Loader Module Corrosion Prevention: TDK Corrosion ResistantLoadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWEREMO: Front x3, Rear x4Cable Length: Monitor 1/2 cables : 15 ft/50ft Cable Length: Pump Cable : 75 ftMonitor: Monitor-1 : Flat Panel with Keyboard on STAND Monitor: Monitor-2 : Remote Flat Panel on STAND IPUP: Alcatel IPUP HARDWARE CONFIGURATIONChamber type: CT CHAMBER CONFIGURATIONProcess kits : Qt/Si Gas inject : 3.5 anodized SGDchamber O-ring: chamraz513Turbo pump: Dual Alcatel 1600RF match: DAIHEN RF generator: ENI GHW 50EPD windows: Quick remove released quartzCM Test port: 1/2 VCR&KF25 DualRGA Port: RGA port W mech valveEndpoint Type: H.O.T ENDPOINTEndpoint Wavelength 1: CO 484 NMEndpoint Wavelength 2: CN 387 NMCathode Temperature Monitor: YESESC Power Supply: CT HV POWER SUPPLYRF Feed: DIRECT CT CATHODEDry pump: EABARA-ESR80WNWall chiller: SMC-H2010Cathode chiller: SMC-INR 496-003DCoolant: HT110ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IALiner: CT LINER Gas Box ConfigurationGas Name: MFC Type-SizeC4F6: FC-PN980CR1BA-150CH2F2: FC-PN980CR1BA-50C4F8: FC-PN980CR1BA-50N2: FC-PN980CR1BA-200CHF3: FC-PN980CR1BA-100CHF3_200: FC-PN980CR1BA-200O2_30: FC-PN980CR1BA-30O2_200: FC-PN980CR1BA-200O2_2000: FC-PN980CR1BA-2000CF4: FC-PN980CR1BA-200AR_200: FC-PN980CR1BA-200AR_1500: FC-DN780C-BA-1500 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps and customer provided items not included on sales