The Fusion M200PC is a photostabilizer used in the semiconductor industry. It uses a special process to harden and impact high-temperature stability to photoresist materials on semiconductor wafers. Photostabilized wafers are capable of withstanding high temperature hard baking.

Axcelis acquired Fusion Systems Corporation in August 1997.
Fusion is a leading worldwide supplier of single-wafer ashers and photostabilizers used in the fabrication of advanced semi- conductor devices.

AXCELIS / FUSION

M200PC

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