描述
無描述配置
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM 代工型號說明
未提供文檔
無文檔
SAMCO
PD-3800LT
已驗證
類別
PECVD
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
26000
晶圓尺寸:
未知
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SAMCO
PD-3800LT
已驗證
類別
PECVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
26000
晶圓尺寸:
未知
年份:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM 代工型號說明
未提供文檔
無文檔