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OXFORD PLASMALAB 100
    描述
    無描述
    配置
    PECVD Gases: Ar - 500 sccm NH3 - 50 sccm 5%SiH4/N2 - 1000 sccm CF4 - 500 sccm O2 - 500 sccm N2O - 2000 sccm N2 - 2000 sccm CB1 - Main Circuit Breaker CB2 - PSU CB3 - Not Used CB4 - RF Generator CB5 - LF Generator CB6 - TEOS CB7 - Not Used CB8 - Foreline Heat CB9 - Table Heat CB10 - Chamber Heat CB11 - Pumpdown Heat CB12 - Chamber Pump CB13 - Loadlock Pump CB14 - Not Used
    OEM 代工型號說明
    The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
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    OXFORD

    PLASMALAB 100

    verified-listing-icon

    已驗證

    類別
    PECVD

    上次驗證: 超過60天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Installed / Idle


    產品編號:

    81699


    晶圓尺寸:

    未知


    年份:

    2011


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    OXFORD PLASMALAB 100

    OXFORD

    PLASMALAB 100

    PECVD
    年份: 0條件: 二手
    上次驗證15 天前

    OXFORD

    PLASMALAB 100

    verified-listing-icon
    已驗證
    類別
    PECVD
    上次驗證: 超過60天前
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/2122157b8b534a4caadb38a679c80b8d_f18883db8295412b87e122592e345232_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/12dba54a4a0a493c83f89220b7e79ff6_1f8484b63085410ea82f3a241d5f6553_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/5a4480378d8647638574ecd1e184b9a0_7ef374e3d5d246ada3b183ef137ff484_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/9be7386faead41569981c3ef8593ed18_efe986b3c280435085f852d8bd7250f21201a_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/d25fd5368241469fa75fd648ab17d014_bffb65934b8a4e59a410eb64f4336ce51201a_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/9bee24ed3fae48d9848016dba32fe866_23c1f11be5ff4ad18591679b2c37354c_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/e6025e20ae5d44e4b05439c89159893a_729f3b8d12d146498dd4da993b47d61f_mw.jpeg
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    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/3e50171efcf34f6e87068a6ce2d727e9_5eecbf6b806c46f7b931c135871d09801201a_mw.jpeg
    listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/dd44921c9c064a789e42227f448b9963_7268e49305e9479baebe593330ddfd64_mw.jpeg
    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Installed / Idle


    產品編號:

    81699


    晶圓尺寸:

    未知


    年份:

    2011


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    無描述
    配置
    PECVD Gases: Ar - 500 sccm NH3 - 50 sccm 5%SiH4/N2 - 1000 sccm CF4 - 500 sccm O2 - 500 sccm N2O - 2000 sccm N2 - 2000 sccm CB1 - Main Circuit Breaker CB2 - PSU CB3 - Not Used CB4 - RF Generator CB5 - LF Generator CB6 - TEOS CB7 - Not Used CB8 - Foreline Heat CB9 - Table Heat CB10 - Chamber Heat CB11 - Pumpdown Heat CB12 - Chamber Pump CB13 - Loadlock Pump CB14 - Not Used
    OEM 代工型號說明
    The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
    文檔

    無文檔

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    查看全部
    OXFORD PLASMALAB 100

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    OXFORD PLASMALAB 100

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    PECVD年份: 0條件: 二手上次驗證:超過60天前
    OXFORD PLASMALAB 100

    OXFORD

    PLASMALAB 100

    PECVD年份: 0條件: 二手上次驗證:6 天前