描述
無描述配置
-Software version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon -Hardware Configuration (Fab): Main System: Vector Express AHMxT System- 1 Handler System: FOUP RF ID Reader- 2 Factory Interface: FOUP- 3 Options System: EBR Capable Loadlock- 1 Options System: First in FAB Kit Vector Express AHMxT- 1 Options System: Secondary Isolation Kit- 1 Options System: High Temperature Process Kit- 1 Options System: Heated Process Manometer- 1 Options System: Ionizer Kit- 1OEM 代工型號說明
Novellus VECTOR Express is an improvement to Novellus’ 300 mm VECTOR plasma-enhanced chemical vapor deposition (PECVD) platform that was introduced in 2007. It maintains industry-leading capital and footprint productivity by improving process throughput by up to 40%, while delivering benchmark thin film process performance that is critical to tool extendibility to 45 nm and beyond. The SmartSoak processing feature is incorporated in VECTOR Express which utilizes the multi-station sequential processing (MSSP) architecture of VECTOR to control wafer heat-up independently from film deposition, improving film quality and reducing processing time . VECTOR Express is also available in an ashable hard mask configuration (VECTOR Express AHM), designed to deposit films for the high aspect ratio patterning requirements required by 193 nm lithography.文檔
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LAM RESEARCH / NOVELLUS
VECTOR EXPRESS
已驗證
類別
PECVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
54601
晶圓尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
VECTOR EXPRESS
類別
PECVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
54601
晶圓尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
-Software version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon -Hardware Configuration (Fab): Main System: Vector Express AHMxT System- 1 Handler System: FOUP RF ID Reader- 2 Factory Interface: FOUP- 3 Options System: EBR Capable Loadlock- 1 Options System: First in FAB Kit Vector Express AHMxT- 1 Options System: Secondary Isolation Kit- 1 Options System: High Temperature Process Kit- 1 Options System: Heated Process Manometer- 1 Options System: Ionizer Kit- 1OEM 代工型號說明
Novellus VECTOR Express is an improvement to Novellus’ 300 mm VECTOR plasma-enhanced chemical vapor deposition (PECVD) platform that was introduced in 2007. It maintains industry-leading capital and footprint productivity by improving process throughput by up to 40%, while delivering benchmark thin film process performance that is critical to tool extendibility to 45 nm and beyond. The SmartSoak processing feature is incorporated in VECTOR Express which utilizes the multi-station sequential processing (MSSP) architecture of VECTOR to control wafer heat-up independently from film deposition, improving film quality and reducing processing time . VECTOR Express is also available in an ashable hard mask configuration (VECTOR Express AHM), designed to deposit films for the high aspect ratio patterning requirements required by 193 nm lithography.文檔
無文檔