描述
PECVD (Chemical Vapor Deposition)配置
無配置OEM 代工型號說明
The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.文檔
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LAM RESEARCH / NOVELLUS
VECTOR EXTREME
已驗證
類別
PECVD
上次驗證: 20 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
91739
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / NOVELLUS
VECTOR EXTREME
類別
PECVD
上次驗證: 20 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
91739
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
PECVD (Chemical Vapor Deposition)配置
無配置OEM 代工型號說明
The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.文檔
無文檔