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描述
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIII配置
CVDOEM 代工型號說明
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.文檔
無文檔
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ASM
EAGLE 12
類別
PECVD
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
49088
晶圓尺寸:
12"/300mm
年份:
2004
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描述
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIII配置
CVDOEM 代工型號說明
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.文檔
無文檔