
描述
Deposition system配置
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 1) heater, missing (Qty 1) heaterOEM 代工型號說明
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.文檔
無文檔
類別
PECVD
上次驗證: 13 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
152528
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PRODUCER III
類別
PECVD
上次驗證: 13 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
152528
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Deposition system配置
Dual loadlock EFEM, robot installed Transfer module (TM), robot installed Process modules: - CHA PECVD TEOS chamber with (Qty 2) heaters - CHB PECVD TEOS chamber with (Qty 1) heater, missing (Qty 1) heaterOEM 代工型號說明
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.文檔
無文檔